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Nikon Metrology XTH
Nikon Metrology XTH 225 ST, Micro Focus X-Ray and CT inspection System

X-Ray CT is a nondestructive technique that visualizes interior features within solid objects. This can be used to obtain information on the 3-D geometries as well as other properties. CT images are often referred to as slices as it corresponds to what the object scanned is opened on a plane. Strengths of the X-ray CT include little to no preparation, non-destructive 3-D imaging, and reconstructive is typically attenuation-conservative. However, large data volumes are required, finite resolution can cause blurring, resolution is limited to 1000-2000X, not all features will have a large enough attenuation contrast for imaging considered useful, and image artifacts like beam hardening might complicate data acquisition.
Specifications:
Ideal sample size? 9in x 7.9in
Interchangeable sources - 225kV reflection target
- 180kV transmission target (3um spot size)
- 225 kV rotating target
General Methods Description:
Samples were mounted securely on the stage in the Nikon XTH 225 ST X-ray CT system. Imaging was performed using transmission, static, or rotating targets depending on sample size, density, and resolution requirements. Scan parameters, including voltage, current, and exposure time, were optimized for contrast and resolution. Three-dimensional reconstructions were generated using Nikon Inspect X software, applying standard corrections for beam hardening, ring artifacts, and background.